Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 015381/0028 | |
| Pages: | 11 |
| | Recorded: | 11/10/2004 | | |
| Attorney Dkt #: | 021773000220US |
| Conveyance: | CORRECTIVE COVERSHEET TO CORRECT THE ASSIGNOR PREVIOUSLY RECORDED ON REEL 015225, FRAME 0702. |
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Total properties:
4
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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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10104887
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Filing Dt:
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03/21/2002
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Publication #:
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Pub Dt:
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09/25/2003
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Title:
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METHOD AND SYSTEM OF USING A SCANNING ELECTRON MICROSCOPE IN SEMICONDUCTOR WAFER INSPECTION WITH Z-STAGE FOCUS
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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10302809
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Filing Dt:
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11/21/2002
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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METHOD FOR IN-LINE MONITORING OF VIA/CONTACT HOLES ETCH PROCESS BASED ON TEST STRUCTURES IN SEMICONDUCTOR WAFER MANUFACTURING
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Patent #:
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Issue Dt:
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11/01/2005
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Application #:
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10601124
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Filing Dt:
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06/20/2003
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Publication #:
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Pub Dt:
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03/11/2004
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Title:
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SWINGING OBJECTIVE RETARDING IMMERSION LENS ELECTRON OPTICS FOCUSING, DEFLECTION AND SIGNAL COLLECTION SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10649599
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Filing Dt:
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08/26/2003
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Title:
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METHOD AND APPARATUS FOR SCANNING SEMICONDUCTOR WAFERS USING A SCANNING ELECTRON MICROSCOPE
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Assignee
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| 18 CREATION ROAD 1 |
| SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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Correspondence name and address
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TOWNSEND AND TOWNSEND AND CREW LLP
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KENT J. TOBIN
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TWO EMBARCADERO CENTER, EIGHTH FLOOR
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SAN FRANCISCO, CA 94111-3834
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