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Reel/Frame:027541/0032   Pages: 4
Recorded: 01/17/2012
Attorney Dkt #:13063USA/CMP/05542-682002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/25/2014
Application #:
13272078
Filing Dt:
10/12/2011
Publication #:
Pub Dt:
02/02/2012
Title:
USING OPTICAL METROLOGY FOR WITHIN WAFER FEED FORWARD PROCESS CONTROL
Assignors
1
Exec Dt:
12/10/2009
2
Exec Dt:
12/11/2009
3
Exec Dt:
12/10/2009
4
Exec Dt:
12/15/2009
5
Exec Dt:
01/04/2010
6
Exec Dt:
12/14/2009
Assignee
1
3050 BOWERS AVENUE M/S 1269
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
DAVID J. GOREN
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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