Patent Assignment Details
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Reel/Frame: | 055624/0032 | |
| Pages: | 8 |
| | Recorded: | 03/17/2021 | | |
Attorney Dkt #: | HITACHI12-0002732US01 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17204201
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Filing Dt:
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03/17/2021
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Publication #:
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Pub Dt:
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07/01/2021
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Assignee
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3-4, KANDAKAJI-CHO |
CHIYODA-KU |
TOKYO, JAPAN 101-0045 |
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Correspondence name and address
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GERALD B.HALT, JR., VOLPE KOENIG
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30 SOUTH 17TH STREET, 18TH FLOOR
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PHILADELPHIA, PA 19103
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