Patent Assignment Details
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Reel/Frame: | 024588/0034 | |
| Pages: | 10 |
| | Recorded: | 06/24/2010 | | |
Attorney Dkt #: | M37.12-0002 |
Conveyance: | MERGER (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/01/1999
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Application #:
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09050267
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Filing Dt:
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03/30/1998
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Title:
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OPTICAL INSPECTION MODULE AND METHOD FOR DETECTING PARTICLES AND DEFECTS ON SUBSTRATES IN INTEGRATED PROCESS TOOLS
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Assignee
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P.O. BOX 20189 |
CASTRO VALLEY, CALIFORNIA 94546 |
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Correspondence name and address
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DAVID D. BRUSH
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900 SECOND AVENUE SOUTH
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SUITE 1400
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MINNEAPOLIS, MN 55402
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