|
Total properties:
28
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/27/1993
|
Application #:
|
07507342
|
Filing Dt:
|
04/10/1990
|
|
Title:
|
RESIST MATERIAL AND PROCESS FOR USE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/1993
|
Application #:
|
07837508
|
Filing Dt:
|
02/18/1992
|
|
Title:
|
RESIST MATERIAL AND PROCESS FOR USE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/27/1999
|
Application #:
|
08797443
|
Filing Dt:
|
02/10/1997
|
|
Title:
|
ATTENUATING EMBEDDED PHASE SHIFT PHOTOMASK BLANKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/1999
|
Application #:
|
09041988
|
Filing Dt:
|
03/13/1998
|
|
Title:
|
METHOD AND APPARATUS FOR REMOVING A PELLICLE FRAME FROM A PHOTOMASK PLATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/19/2002
|
Application #:
|
09534808
|
Filing Dt:
|
03/24/2000
|
|
Title:
|
METHOD AND APPARATUS FOR EVALUATING THE RUNABILITY OF A PHOTOMASK INSPECTION TOOL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/23/2002
|
Application #:
|
09545145
|
Filing Dt:
|
04/07/2000
|
|
Title:
|
TEST PHOTOMASK AND METHOD FOR INVESTIGATING ESD-INDUCED RETICLE DEFECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/16/2003
|
Application #:
|
09610917
|
Filing Dt:
|
07/05/2000
|
|
Title:
|
NETWORK-BASED PHOTOMASK DATA ENTRY INTERFACE AND INSTRUCTION GENERATOR FOR MANUFACTURING PHOTOMASKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/22/2003
|
Application #:
|
09854284
|
Filing Dt:
|
05/10/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/20/2002
| | | | |
|
Title:
|
PHOTOMASK AND METHOD FOR CORRECTING FEATURE SIZE ERRORS ON THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/22/2003
|
Application #:
|
09874818
|
Filing Dt:
|
06/05/2001
|
|
Publication #:
|
|
Pub Dt:
|
11/15/2001
| | | | |
|
Title:
|
TEST PHOTOMASK AND METHOD FOR INVESTIGATING ESD-INDUCED RETICLE DEFECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/13/2004
|
Application #:
|
09989509
|
Filing Dt:
|
11/20/2001
|
|
Title:
|
METHOD AND APPARATUS FOR EVALUATING THE RUNABILITY OF A PHOTOMASK INSPECTION TOOL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2005
|
Application #:
|
09996333
|
Filing Dt:
|
11/28/2001
|
|
Title:
|
PHOTOMASK AND METHOD FOR REDUCING EXPOSURE TIMES OF HIGH DENSITY PATTERNS ON THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/09/2004
|
Application #:
|
10023055
|
Filing Dt:
|
12/13/2001
|
|
Title:
|
METHOD AND APPARATUS FOR REDUCING LOADING EFFECTS ON A SEMICONDUCTOR MANUFACTURING COMPONENT DURING AN ETCH PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/11/2005
|
Application #:
|
10044076
|
Filing Dt:
|
01/11/2002
|
|
Title:
|
DAMAGE RESISTANT PHOTOMASK CONSTRUCTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/24/2004
|
Application #:
|
10044562
|
Filing Dt:
|
01/11/2002
|
|
Title:
|
ALTERNATING APERTURE PHASE SHIFTING PHOTOMASK WITH IMPROVED TRANSMISSION BALANCING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/06/2004
|
Application #:
|
10044732
|
Filing Dt:
|
01/11/2002
|
|
Title:
|
ALTERNATING APERTURE PHASE SHIFTING PHOTOMASK WITH IMPROVED INTENSITY BALANCING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/09/2003
|
Application #:
|
10071167
|
Filing Dt:
|
02/08/2002
|
|
Publication #:
|
|
Pub Dt:
|
06/20/2002
| | | | |
|
Title:
|
TEST WAFER AND METHOD FOR INVESTIGATING ELECTROSTATIC DISCHARGE INDUCED WAFER DEFECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/28/2005
|
Application #:
|
10072204
|
Filing Dt:
|
02/07/2002
|
|
Title:
|
METHOD AND APPARATUS FOR COUPLING A PELLICLE TO A PHOTOMASK USING A NON-DISTORTING MECHANISM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/21/2004
|
Application #:
|
10100348
|
Filing Dt:
|
03/18/2002
|
|
Title:
|
METHOD AND APPARATUS FOR TRIMMING A PELLICLE FILM USING A LASER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2005
|
Application #:
|
10106605
|
Filing Dt:
|
03/26/2002
|
|
Title:
|
METHOD FOR CONSTRUCTING A PHOTOMASK ASSEMBLY USING AN ENCODED MARK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/12/2004
|
Application #:
|
10108222
|
Filing Dt:
|
03/27/2002
|
|
Title:
|
PHOTOMASK AND METHOD FOR FORMING AN OPAQUE BORDER ON THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/2004
|
Application #:
|
10116431
|
Filing Dt:
|
04/04/2002
|
|
Title:
|
COVERED PHOTOMASK HOLDER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/11/2005
|
Application #:
|
10120935
|
Filing Dt:
|
04/11/2002
|
|
Title:
|
METHOD AND APPARATUS FOR COUPLING A PELLICLE ASSEMBLY TO A PHOTOMASK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/2005
|
Application #:
|
10189082
|
Filing Dt:
|
07/03/2002
|
|
Title:
|
METHOD AND APPARATUS FOR CALIBRATING A METROLOGY TOOL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/2005
|
Application #:
|
10247426
|
Filing Dt:
|
09/19/2002
|
|
Title:
|
PHOTOMASK AND METHOD FOR EVALUATING AN INITIAL CALIBRATION FOR A SCANNING ELECTRON MICROSCOPE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2005
|
Application #:
|
10290574
|
Filing Dt:
|
11/08/2002
|
|
Title:
|
PHOTOMASK AND METHOD FOR REDUCING ELECTROSTATIC DISCHARGE ON THE SAME WITH AN ESD PROTECTION PATTERN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/31/2005
|
Application #:
|
10301195
|
Filing Dt:
|
11/21/2002
|
|
Title:
|
PHOTOMASK AND METHOD FOR DETECTING VIOLATIONS IN A MASK PATTERN FILE USING A MANUFACTURING RULE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/21/2005
|
Application #:
|
10314844
|
Filing Dt:
|
12/09/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/23/2003
| | | | |
|
Title:
|
PHOTOMASK AND METHOD FOR QUALIFYING THE SAME WITH A PROTOTYPE SPECIFICATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/12/2004
|
Application #:
|
10317565
|
Filing Dt:
|
12/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
06/26/2003
| | | | |
|
Title:
|
MULTI-TONE PHOTOMASK AND METHOD FOR MANUFACTURING THE SAME
|
|
