Total properties:
16
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Patent #:
|
|
Issue Dt:
|
12/12/2000
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Application #:
|
09358568
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Filing Dt:
|
07/20/1999
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Title:
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SEMICONDUCTOR WAFER CLEANING METHOD
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Patent #:
|
|
Issue Dt:
|
10/02/2001
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Application #:
|
09643328
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Filing Dt:
|
08/22/2000
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Title:
|
WAFER CLEANING METHOD
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|
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Patent #:
|
|
Issue Dt:
|
04/30/2002
|
Application #:
|
09694938
|
Filing Dt:
|
10/23/2000
|
Title:
|
SEMICONDUCTOR WAFER CLEANING SYSTEM
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09916357
|
Filing Dt:
|
07/27/2001
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Publication #:
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|
Pub Dt:
|
07/04/2002
| | | | |
Title:
|
Small parts cleaner
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2004
|
Application #:
|
09922509
|
Filing Dt:
|
08/03/2001
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Publication #:
|
|
Pub Dt:
|
02/06/2003
| | | | |
Title:
|
MEGASONIC PROBE ENERGY ATTENUATOR
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|
|
Patent #:
|
|
Issue Dt:
|
10/15/2002
|
Application #:
|
09953504
|
Filing Dt:
|
09/13/2001
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Publication #:
|
|
Pub Dt:
|
01/31/2002
| | | | |
Title:
|
WAFER CLEANING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
10/30/2007
|
Application #:
|
10059682
|
Filing Dt:
|
01/29/2002
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Publication #:
|
|
Pub Dt:
|
07/31/2003
| | | | |
Title:
|
MEGASONIC PROBE ENERGY DIRECTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
03/06/2007
|
Application #:
|
10140029
|
Filing Dt:
|
05/06/2002
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Publication #:
|
|
Pub Dt:
|
11/06/2003
| | | | |
Title:
|
RECIPROCATING MEGASONIC PROBE
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|
|
Patent #:
|
|
Issue Dt:
|
06/29/2004
|
Application #:
|
10171426
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
MEGASONIC CLEANER AND DRYER
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2005
|
Application #:
|
10171429
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
STACKABLE PROCESS CHAMBERS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2005
|
Application #:
|
10171430
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
MEGASONIC CLEANER AND DRYER SYSTEM
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10171431
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
Method of applying liquid to a megasonic apparatus for improved cleaning control
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10171494
|
Filing Dt:
|
06/12/2002
|
Publication #:
|
|
Pub Dt:
|
02/05/2004
| | | | |
Title:
|
Megasonic cleaner and dryer system
|
|
|
Patent #:
|
|
Issue Dt:
|
01/27/2004
|
Application #:
|
10243463
|
Filing Dt:
|
09/12/2002
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
Title:
|
WAFER CLEANING
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2004
|
Application #:
|
10243486
|
Filing Dt:
|
09/12/2002
|
Publication #:
|
|
Pub Dt:
|
01/23/2003
| | | | |
Title:
|
WAFER CLEANING
|
|
|
Patent #:
|
|
Issue Dt:
|
09/12/2006
|
Application #:
|
10341425
|
Filing Dt:
|
01/10/2003
|
Publication #:
|
|
Pub Dt:
|
07/15/2004
| | | | |
Title:
|
MEGASONIC CLEANING SYSTEM WITH BUFFERED CAVITATION METHOD
|
|