Patent Assignment Details
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| Reel/Frame: | 013799/0048 | |
| Pages: | 10 |
| | Recorded: | 03/03/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10274250
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Filing Dt:
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10/18/2002
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Publication #:
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Pub Dt:
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04/22/2004
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Title:
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Sub-atmospheric supply of fluorine to semiconductor process chamber
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Assignee
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| 575 MOUNTAIN AVENUE |
| MURRAY HILL |
| NEW PROVIDENCE, NEW JERSEY 07974 |
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Correspondence name and address
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THE BOC GROUP, INC.
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IRA LEE ZEBRAK
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100 MOUNTAIN AVE., LEGAL SERVICES, I. P.
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MURRAY HILL, NJ 07974
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