Total properties:
42
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09623194
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Filing Dt:
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08/29/2000
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Title:
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METHOD FOR PATTERN GENERATION WITH IMPROVED IMAGE QUALITY
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Patent #:
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Issue Dt:
|
06/08/2004
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Application #:
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09623195
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Filing Dt:
|
08/29/2000
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Title:
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PATTERN GENERATOR
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Patent #:
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Issue Dt:
|
06/04/2002
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Application #:
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09623200
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Filing Dt:
|
08/29/2000
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Title:
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PATTERN GENERATOR WITH IMPROVED PRECISION
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Patent #:
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Issue Dt:
|
02/03/2004
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Application #:
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09623270
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Filing Dt:
|
08/31/2000
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Title:
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PATTERN GENERATOR USING EUV
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Patent #:
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Issue Dt:
|
04/16/2002
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Application #:
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09623308
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Filing Dt:
|
08/31/2000
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Title:
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PATTERN GENERATOR WITH IMPROVED ADDRESS RESOLUTION
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Patent #:
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Issue Dt:
|
09/04/2001
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Application #:
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09623310
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Filing Dt:
|
08/31/2000
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Title:
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Pattern generator for avoiding stitching errors
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Patent #:
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Issue Dt:
|
01/07/2003
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Application #:
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09623311
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Filing Dt:
|
08/31/2000
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Title:
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MODULATOR DESIGN FOR PATTERN GENERATOR
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Patent #:
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Issue Dt:
|
11/11/2003
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Application #:
|
09664288
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Filing Dt:
|
09/18/2000
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Title:
|
DUAL LAYER RETICLE BLANK AND MANUFACTURING PROCESS
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|
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Patent #:
|
|
Issue Dt:
|
11/09/2004
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Application #:
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09824670
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Filing Dt:
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04/04/2001
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Publication #:
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Pub Dt:
|
02/28/2002
| | | | |
Title:
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PATTERN GENERATOR
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Patent #:
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|
Issue Dt:
|
09/23/2003
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Application #:
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09869922
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Filing Dt:
|
11/02/2001
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Title:
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LASER WRITER
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Patent #:
|
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Issue Dt:
|
11/27/2007
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Application #:
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09954721
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Filing Dt:
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09/12/2001
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Publication #:
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Pub Dt:
|
08/28/2003
| | | | |
Title:
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GRAPHICS ENGINE FOR HIGH PRECISION LITHOGRAPHY
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Patent #:
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|
Issue Dt:
|
08/12/2003
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Application #:
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09992653
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Filing Dt:
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11/16/2001
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Publication #:
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Pub Dt:
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09/12/2002
| | | | |
Title:
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RETICLE AND DIRECT LITHOGRAPHY WRITING STRATEGY
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Patent #:
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Issue Dt:
|
09/09/2003
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Application #:
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09995526
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Filing Dt:
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11/28/2001
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Publication #:
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Pub Dt:
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05/29/2003
| | | | |
Title:
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DEFECTIVE PIXEL COMPENSATION METHOD
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|
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Patent #:
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|
Issue Dt:
|
04/06/2004
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Application #:
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10049286
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Filing Dt:
|
02/11/2002
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Title:
|
DATA PATH FOR HIGH PERFORMANCE PATTERN GENERATOR
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|
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Patent #:
|
|
Issue Dt:
|
11/02/2004
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Application #:
|
10129364
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Filing Dt:
|
05/03/2002
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Title:
|
METHOD AND APPARATUS FOR PERSONALIZATION OF SEMICONDUCTOR
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|
|
Patent #:
|
|
Issue Dt:
|
03/02/2004
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Application #:
|
10130070
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Filing Dt:
|
05/15/2002
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Publication #:
|
|
Pub Dt:
|
10/24/2002
| | | | |
Title:
|
PATTERN GENERATION SYSTEM USING A SPATIAL LIGHT MODULATOR
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|
|
Patent #:
|
|
Issue Dt:
|
11/16/2004
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Application #:
|
10238177
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Filing Dt:
|
09/10/2002
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Publication #:
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|
Pub Dt:
|
04/17/2003
| | | | |
Title:
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HOMOGENIZATION OF A SPATIALLY COHERENT RADIATION BEAM AND PRINTING AND INSPECTION, RESPECTIVELY, OF A PATTERN ON A WORKPIECE
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|
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Patent #:
|
|
Issue Dt:
|
11/15/2005
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Application #:
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10238220
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Filing Dt:
|
09/10/2002
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Publication #:
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|
Pub Dt:
|
05/01/2003
| | | | |
Title:
|
Method and apparatus of calibrating multi-position SLM elements
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|
|
Patent #:
|
|
Issue Dt:
|
06/07/2005
|
Application #:
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10308917
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Filing Dt:
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12/03/2002
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Publication #:
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|
Pub Dt:
|
07/03/2003
| | | | |
Title:
|
HOMOGENIZER
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|
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Patent #:
|
|
Issue Dt:
|
09/27/2005
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Application #:
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10310637
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Filing Dt:
|
12/04/2002
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Publication #:
|
|
Pub Dt:
|
07/10/2003
| | | | |
Title:
|
ALIGNMENT SENSOR
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10410874
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Filing Dt:
|
04/10/2003
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Publication #:
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|
Pub Dt:
|
12/18/2003
| | | | |
Title:
|
Methods and systems for process control of corner feature embellishment
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|
|
Patent #:
|
|
Issue Dt:
|
01/17/2006
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Application #:
|
10449661
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Filing Dt:
|
05/30/2003
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Publication #:
|
|
Pub Dt:
|
10/30/2003
| | | | |
Title:
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PATTERN GENERATOR MIRROR CONFIGURATIONS
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|
|
Patent #:
|
|
Issue Dt:
|
12/21/2004
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Application #:
|
10460765
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Filing Dt:
|
06/12/2003
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Publication #:
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|
Pub Dt:
|
12/16/2004
| | | | |
Title:
|
METHOD FOR HIGH PRECISION PRINTING OF PATTERNS
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|
|
Patent #:
|
|
Issue Dt:
|
09/12/2006
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Application #:
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10462010
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Filing Dt:
|
06/12/2003
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Publication #:
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|
Pub Dt:
|
03/18/2004
| | | | |
Title:
|
METHODS AND SYSTEMS FOR IMPROVED BOUNDARY CONTRAST
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|
|
Patent #:
|
|
Issue Dt:
|
06/13/2006
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Application #:
|
10488353
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Filing Dt:
|
09/01/2004
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Publication #:
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|
Pub Dt:
|
01/06/2005
| | | | |
Title:
|
BONDING METHOD
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|
|
Patent #:
|
|
Issue Dt:
|
04/29/2008
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Application #:
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10498590
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Filing Dt:
|
06/10/2004
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Publication #:
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|
Pub Dt:
|
04/21/2005
| | | | |
Title:
|
METHOD AND APPARATUS FOR IMAGE FORMATION
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|
|
Patent #:
|
|
Issue Dt:
|
07/29/2008
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Application #:
|
10498713
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Filing Dt:
|
06/14/2004
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Publication #:
|
|
Pub Dt:
|
04/21/2005
| | | | |
Title:
|
METHOD AND APPARATUS FOR PATTERNING A WORKPIECE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2007
|
Application #:
|
10505564
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Filing Dt:
|
08/24/2004
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Publication #:
|
|
Pub Dt:
|
08/04/2005
| | | | |
Title:
|
IMAGE FORMING METHOD AND APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/2006
|
Application #:
|
10507554
|
Filing Dt:
|
09/14/2004
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Publication #:
|
|
Pub Dt:
|
06/09/2005
| | | | |
Title:
|
ADDRESSING METHOD OF MOVABLE ELEMENTS IN A SPATIAL LIGHT MODULATOR (SLM)
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10510059
|
Filing Dt:
|
05/31/2005
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Publication #:
|
|
Pub Dt:
|
10/06/2005
| | | | |
Title:
|
Mask blank and a method for producing the same
|
|
|
Patent #:
|
|
Issue Dt:
|
03/06/2007
|
Application #:
|
10634152
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Filing Dt:
|
08/04/2003
|
Publication #:
|
|
Pub Dt:
|
02/10/2005
| | | | |
Title:
|
METHOD TO PATTERN A SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2004
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Application #:
|
10657526
|
Filing Dt:
|
09/08/2003
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Publication #:
|
|
Pub Dt:
|
03/11/2004
| | | | |
Title:
|
DEFECTIVE PIXEL COMPENSATION METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/2006
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Application #:
|
10704957
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Filing Dt:
|
11/10/2003
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Publication #:
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|
Pub Dt:
|
11/18/2004
| | | | |
Title:
|
DUAL LAYER WORKPIECE MASKING AND MANUFACTURING PROCESS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/07/2006
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Application #:
|
10776192
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Filing Dt:
|
02/12/2004
|
Publication #:
|
|
Pub Dt:
|
08/26/2004
| | | | |
Title:
|
PATTERN GENERATOR
|
|
|
Patent #:
|
|
Issue Dt:
|
09/15/2009
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Application #:
|
10782863
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Filing Dt:
|
02/23/2004
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Publication #:
|
|
Pub Dt:
|
08/19/2004
| | | | |
Title:
|
DATA PATH FOR HIGH PERFORMANCE PATTERN GENERATOR
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/2008
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Application #:
|
10827530
|
Filing Dt:
|
04/20/2004
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Publication #:
|
|
Pub Dt:
|
12/30/2004
| | | | |
Title:
|
METHOD FOR ERROR REDUCTION IN LITHOGRAPHY
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/2008
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Application #:
|
10911218
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Filing Dt:
|
08/04/2004
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Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
Title:
|
PSM ALIGNMENT METHOD AND DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
12/19/2006
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Application #:
|
10911412
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Filing Dt:
|
08/04/2004
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
Title:
|
FURTHER METHOD TO PATTERN A SUBSTRATE
|
|
|
Patent #:
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|
Issue Dt:
|
10/02/2007
|
Application #:
|
10937737
|
Filing Dt:
|
09/09/2004
|
Publication #:
|
|
Pub Dt:
|
03/09/2006
| | | | |
Title:
|
HEALING ALGORITHM
|
|
|
Patent #:
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|
Issue Dt:
|
05/01/2007
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Application #:
|
10953560
|
Filing Dt:
|
09/30/2004
|
Publication #:
|
|
Pub Dt:
|
03/03/2005
| | | | |
Title:
|
METHOD AND APPARATUS FOR PERSONALIZATION OF SEMICONDUCTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
02/05/2008
|
Application #:
|
10987589
|
Filing Dt:
|
11/12/2004
|
Publication #:
|
|
Pub Dt:
|
08/25/2005
| | | | |
Title:
|
METHOD AND DEVICE FOR CORRECTING SLM STAMP IMAGE IMPERFECTIONS
|
|
|
Patent #:
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|
Issue Dt:
|
09/19/2006
|
Application #:
|
11008566
|
Filing Dt:
|
12/10/2004
|
Publication #:
|
|
Pub Dt:
|
06/16/2005
| | | | |
Title:
|
METHOD AND APPARATUS FOR PATTERNING A WORKPIECE AND METHODS OF MANUFACTURING THE SAME
|
|