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Reel/Frame:024451/0052   Pages: 4
Recorded: 05/27/2010
Attorney Dkt #:18239-0074001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/08/2014
Application #:
12727482
Filing Dt:
03/19/2010
Publication #:
Pub Dt:
09/16/2010
Title:
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS WITH CORRECTION OPTICAL SYSTEM THAT HEATS PROJECTION OBJECTIVE ELEMENT
Assignors
1
Exec Dt:
05/20/2010
2
Exec Dt:
04/09/2010
3
Exec Dt:
04/12/2010
4
Exec Dt:
04/01/2010
Assignee
1
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondence name and address
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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