Patent Assignment Details
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Reel/Frame: | 016726/0053 | |
| Pages: | 2 |
| | Recorded: | 07/07/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11138673
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Filing Dt:
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05/27/2005
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Publication #:
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Pub Dt:
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11/30/2006
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Title:
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Method and system for determining a positioning error of an electron beam of a scanning electron microscope
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Assignee
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ST.-MARTIN-STR. 53 |
MUNICH, GERMANY 81669 |
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Correspondence name and address
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PATRICK J. FINNAN
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EDELL, SHAPIRO & FINNAN, LLC
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1901 RESEARCH BLVD.
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SUITE 400
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ROCKVILLE, MARYLAND 20850
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