Patent Assignment Details
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| Reel/Frame: | 027772/0053 | |
| Pages: | 10 |
| | Recorded: | 02/28/2012 | | |
| Attorney Dkt #: | 03147.0050.USN0 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/15/2013
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Application #:
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13295246
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Filing Dt:
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11/14/2011
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Publication #:
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Pub Dt:
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11/22/2012
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Title:
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CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH APERTURE ARRAY COOLING
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Assignee
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| COMPUTERLAAN 15 |
| DELFT, NETHERLANDS 2628 XK |
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Correspondence name and address
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HOYNG MONEGIER LLP
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REMBRANDT TOWER, 31ST FL, AMSTELPLEIN 1
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AMSTERDAM, 1096 HA NETHERLANDS
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