Patent Assignment Details
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| Reel/Frame: | 020801/0056 | |
| Pages: | 4 |
| | Recorded: | 04/14/2008 | | |
| Attorney Dkt #: | M-17036 US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12102616
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Filing Dt:
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04/14/2008
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Publication #:
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Pub Dt:
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05/21/2009
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Title:
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AIM-Compatible Targets for Use with Methods of Inspecting and Optionally Reworking Summed Photolithography Patterns Resulting from Plurally-Overlaid Patterning Steps During Mass Production of Semiconductor Devices
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Assignee
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| 30 TOH GUAN ROAD, |
| #08-09 ODC DISTRICENTRE, |
| SINGAPORE, SINGAPORE 608840 |
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Correspondence name and address
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GIDEON GIMLAN
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2033 GATEWAY PLACE
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SUITE 400
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SAN JOSE, CA 95110
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