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Reel/Frame:027073/0058   Pages: 3
Recorded: 10/17/2011
Attorney Dkt #:A14881/T102210(796644)
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/03/2014
Application #:
13197487
Filing Dt:
08/03/2011
Publication #:
Pub Dt:
08/02/2012
Title:
UNIFORM DRY ETCH IN TWO STAGES
Assignors
1
Exec Dt:
10/12/2011
2
Exec Dt:
10/17/2011
3
Exec Dt:
10/12/2011
Assignee
1
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
WILLIAM L. SHAFFER
KILPATRICK TOWNSEND & STOCKTON LLP
TWO EMBARCADERO CENTER, 8TH FLOOR
SAN FRANCISCO, CA 94111

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