Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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Reel/Frame: | 058526/0058 | |
| Pages: | 12 |
| | Recorded: | 12/16/2021 | | |
Attorney Dkt #: | 35470-51393/US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17553112
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Filing Dt:
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12/16/2021
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Publication #:
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Pub Dt:
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06/23/2022
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Title:
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SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS, AND PROGRAM OF CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS
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Assignee
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3-1 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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DOHYUN AHN
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801 CALIFORNIA STREET
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FENWICK & WEST LLP
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MOUNTAIN VIEW, CA 94041
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05/23/2024 04:56 AM
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