Patent Assignment Details
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| Reel/Frame: | 017854/0062 | |
| Pages: | 18 |
| | Recorded: | 06/29/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/18/2011
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Application #:
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11335099
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Filing Dt:
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01/18/2006
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Publication #:
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Pub Dt:
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07/20/2006
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Title:
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END POINT DETECTION METHOD FOR PLASMA ETCHING OF SEMICONDUCTOR WAFERS WITH LOW EXPOSED AREA
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Assignee
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| 4637 CHABOT DRIVE |
| PLEASANTON, CALIFORNIA 94588 |
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Correspondence name and address
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MICHAEL W. CALDWELL
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4226 RIVERMARK PARKWAY
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SANTA CLARA, CA 95054
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