Patent Assignment Details
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| Reel/Frame: | 013249/0064 | |
| Pages: | 7 |
| | Recorded: | 08/21/2002 | | |
| Conveyance: | RE-RECORD TO CORRECT THE 3RD CONVEYING PARTY'S NAME. PREVIOUSLY RECORDED AT REEL 012359, FRAME 0222. |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/08/2003
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Application #:
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10004680
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Filing Dt:
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12/05/2001
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Publication #:
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Pub Dt:
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06/05/2003
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Title:
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APPARATUS AND METHOD FOR PREVENTING A WAFER MAPPING SYSTEM OF AN SMIF SYSTEM FROM BEING POLLUTED BY CORROSIVE GASES REMAINING ON WAFERS
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Assignee
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| 3 FL., NO. 19, LI-SHING ROAD |
| HSINCHU SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU CITY, TAIWAN R.O.C. |
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Correspondence name and address
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LADAS & PARRY
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WILLIAM R. EVANS
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26 WEST 61ST STREET
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NEW YORK, NY 10023
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