Patent Assignment Details
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Reel/Frame: | 015021/0068 | |
| Pages: | 4 |
| | Recorded: | 02/24/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10784772
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Filing Dt:
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02/24/2004
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Publication #:
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Pub Dt:
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08/26/2004
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Title:
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Apparatus for fabricating semiconductor devices, heating arrangement, shower head arrangement, method of reducing thermal disturbance during fabrication of a semiconductor device, and method of exchanging heat during fabrication of a semiconductor device
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Assignee
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416 MAETAN-DONG, YEONGTONG-GU, SUWON-SI |
GYEONGGI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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JOHN A. CASTELLANO
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P.O. BOX 8910
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RESTON, VA 20195
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