Patent Assignment Details
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Reel/Frame: | 009809/0075 | |
| Pages: | 6 |
| | Recorded: | 03/01/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/16/1999
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Application #:
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09259928
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Filing Dt:
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03/01/1999
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Title:
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METHOD OF CHARACTERIZING LINEWIDTH ERRORS IN A SCANNING LITHOGRAPHY SYSTEM
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Assignee
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P.O. BOX 3453 |
ONE AMD PLACE |
SUNNYVALE, CALIFORNIA 94088 |
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Correspondence name and address
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RENNER, OTTO, BOISSELLE & SKLAR, P.L.L.
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CYNTHIA S. MURPHY
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1621 EUCLID AVE.
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19TH FLOOR
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CLEVELAND, OH 44115
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