Patent Assignment Details
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| Reel/Frame: | 008467/0081 | |
| Pages: | 3 |
| | Recorded: | 03/19/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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08820893
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Filing Dt:
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03/19/1997
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Title:
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CONTROLLED ISOTROPIC ETCH PROCESS AND METHOD OF FORMING AN OPENING IN A DIELECTRIC LAYER
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Assignee
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| 3901 N. FIRST ST. |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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OBLON, SPIVAK ET AL.
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PAUL E. RAUCH, PH.D.
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VIRGINIA 22202
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