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Patent Assignment Details

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Reel/Frame:	005020/0082			Pages:	9
		Recorded:	07/01/1988
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST.

Total properties: 30

Patent #:	3587644	Issue Dt:		Application #:	04751920	Filing Dt:
Title:

Patent #:	3571789	Issue Dt:		Application #:	04777854	Filing Dt:
Title:

Patent #:	3599288	Issue Dt:		Application #:	04793341	Filing Dt:
Title:

Patent #:	3588807	Issue Dt:		Application #:	04794056	Filing Dt:
Title:

Patent #:	3641486	Issue Dt:		Application #:	04835343	Filing Dt:
Title:

Patent #:	3616461	Issue Dt:		Application #:	04882522	Filing Dt:
Title:

Patent #:	3619403	Issue Dt:	11/09/1971	Application #:	05051275	Filing Dt:	06/30/1970
Title:	GAS REACTION APPARATUS

Patent #:	3742217	Issue Dt:		Application #:	05107257	Filing Dt:
Title:

Patent #:	3705091	Issue Dt:	12/05/1972	Application #:	05186739	Filing Dt:	10/05/1971
Title:	GAS DISCHARGE APPARATUS

Patent #:	3795557	Issue Dt:	03/05/1974	Application #:	05252863	Filing Dt:
Title:	PROCESS AND MATERIAL FOR MANUFACTURING SEMICONDUCTOR DEVICES

Patent #:	3766382	Issue Dt:		Application #:	05299864	Filing Dt:
Title:

Patent #:	3775621	Issue Dt:		Application #:	05319872	Filing Dt:
Title:

Patent #:	3806365	Issue Dt:	04/23/1974	Application #:	05322134	Filing Dt:
Title:	PROCESS FOR USE IN THE MANUFACTURE OF SEMICONDUCTIVE DEVICES

Patent #:	3854322	Issue Dt:		Application #:	05367631	Filing Dt:
Title:

Patent #:	3901071	Issue Dt:		Application #:	05400524	Filing Dt:
Title:

Patent #:	3951843	Issue Dt:		Application #:	05413884	Filing Dt:
Title:

Patent #:	3867216	Issue Dt:	02/18/1975	Application #:	05416422	Filing Dt:	11/16/1973
Title:	PROCESS AND MATERIAL FOR MANUFACTURING SEMICONDUCTOR DEVICES

Patent #:	3951709	Issue Dt:	04/20/1976	Application #:	05446931	Filing Dt:	02/28/1974
Title:	PROCESS AND MATERIAL FOR SEMICONDUCTOR PHOTOMASK FABRICATION

Patent #:	3930913	Issue Dt:		Application #:	05489598	Filing Dt:
Title:

Patent #:	4362632	Issue Dt:	12/07/1982	Application #:	05494024	Filing Dt:	08/02/1974
Title:	GAS DISCHARGE APPARATUS

Patent #:	3952249	Issue Dt:		Application #:	05507280	Filing Dt:
Title:

Patent #:	3962559	Issue Dt:		Application #:	05538401	Filing Dt:
Title:

Patent #:	4066037	Issue Dt:	01/03/1978	Application #:	05641441	Filing Dt:	12/17/1975
Title:	APPARATUS FOR DEPOSITING DIELECTRIC FILMS USING A GLOW DISCHARGE

Patent #:	4028155	Issue Dt:	06/07/1977	Application #:	05713128	Filing Dt:
Title:	PROCESS AND MATERIAL FOR MANUFACTURING THIN FILM INTEGRATED CIRCUITS

Patent #:	RE30505	Issue Dt:	02/03/1981	Application #:	05914540	Filing Dt:	06/12/1978
Title:	PROCESS AND MATERIAL FOR MANUFACTURING SEMICONDUCTOR DEVICES

Patent #:	4353777	Issue Dt:	10/12/1982	Application #:	06255495	Filing Dt:	04/20/1981
Title:	SELECTIVE PLASMA POLYSILICON ETCHING

Patent #:	4476717	Issue Dt:	10/16/1984	Application #:	06266563	Filing Dt:	05/22/1981
Title:	SCANNING GAUGE APPARATUS

Patent #:	4498354	Issue Dt:	02/12/1985	Application #:	06440268	Filing Dt:	11/09/1982
Title:	AUTOMATIC LOCK FOR TWO MODE PISTON PUMP

Patent #:	4505782	Issue Dt:	03/19/1985	Application #:	06535929	Filing Dt:	09/26/1983
Title:	PLASMA REACTIVE ION ETCHING OF ALUMINUM AND ALUMINUM ALLOYS

Patent #:	4526670	Issue Dt:	07/02/1985	Application #:	06589558	Filing Dt:	03/14/1984
Title:	AUTOMATICALLY LOADABLE MULTIFACETED EECTRODE WITH LOAD LOCK MECHANISM

Assignor

Exec Dt:

12/31/1987

Assignee

Correspondence name and address
	LAHIVE & COCKFIELD
	SIXTY STATE ST.
	BOSTON, MA 02109

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