Patent Assignment Details
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Reel/Frame: | 023018/0082 | |
| Pages: | 10 |
| | Recorded: | 07/28/2009 | | |
Attorney Dkt #: | TOM-LRL-1001 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12524855
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Filing Dt:
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07/28/2009
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Publication #:
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Pub Dt:
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08/26/2010
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Title:
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Method and Apparatus for Measuring Process Parameters of a Plasma Etch Process
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Assignee
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THE INVENT CENTRE |
DUBLIN CITY UNIVERSITY, GLASNEVIN |
DUBLIN, IRELAND 9 |
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Correspondence name and address
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LOZA & LOZA LLP
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305 N. SECOND AVENUE, #127
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UPLAND, CA 91786-6064
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