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Total properties:
16
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Patent #:
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Issue Dt:
|
09/20/2011
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Application #:
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11408558
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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04/26/2007
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Title:
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METHOD FOR AGILE WORKPIECE TEMPERATURE CONTROL IN A PLASMA REACTOR USING A THERMAL MODEL
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Patent #:
|
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Issue Dt:
|
09/06/2011
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Application #:
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11408559
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
|
04/26/2007
| | | | |
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Title:
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PLASMA REACTOR WITH A MULTIPLE ZONE THERMAL CONTROL FEED FORWARD CONTROL APPARATUS
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Patent #:
|
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Issue Dt:
|
07/17/2012
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Application #:
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11408567
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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04/26/2007
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Title:
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PLASMA REACTOR WITH WAFER BACKSIDE THERMAL LOOP, TWO-PHASE INTERNAL PEDESTAL THERMAL LOOP AND A CONTROL PROCESSOR GOVERNING BOTH LOOPS
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Patent #:
|
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Issue Dt:
|
12/17/2013
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Application #:
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11409183
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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04/26/2007
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Title:
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PLASMA REACTOR WITH FEED FORWARD THERMAL CONTROL SYSTEM USING A THERMAL MODEL FOR ACCOMMODATING RF POWER CHANGES OR WAFER TEMPERATURE CHANGES
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Patent #:
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Issue Dt:
|
08/14/2012
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Application #:
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12410580
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Filing Dt:
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03/25/2009
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Publication #:
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Pub Dt:
|
10/01/2009
| | | | |
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Title:
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THERMAL CONTROL SYSTEM AND METHOD
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|
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Patent #:
|
|
Issue Dt:
|
09/10/2013
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Application #:
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12558641
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Filing Dt:
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09/14/2009
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Publication #:
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Pub Dt:
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03/25/2010
| | | | |
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Title:
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METHOD AND APPARATUS FOR THERMAL EXCHANGE WITH TWO-PHASE MEDIA
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|
|
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Patent #:
|
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Issue Dt:
|
06/04/2013
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Application #:
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12726379
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Filing Dt:
|
03/18/2010
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Title:
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SYSTEM AND METHOD FOR THERMAL CONTROL OF DIFFERENT HEAT LOADS FROM A SINGLE SOURCE OF SATURATED FLUIDS
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Patent #:
|
|
Issue Dt:
|
03/17/2015
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Application #:
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12855670
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Filing Dt:
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08/12/2010
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Publication #:
|
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Pub Dt:
|
12/16/2010
| | | | |
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Title:
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PLASMA REACTOR WITH A MULTIPLE ZONE THERMAL CONTROL FEED FORWARD CONTROL APPARATUS
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|
|
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Patent #:
|
|
Issue Dt:
|
12/11/2012
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Application #:
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12949028
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Filing Dt:
|
11/18/2010
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Publication #:
|
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Pub Dt:
|
03/17/2011
| | | | |
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Title:
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METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR USING FEED FORWARD THERMAL CONTROL
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|
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Patent #:
|
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Issue Dt:
|
10/01/2013
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Application #:
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12953793
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Filing Dt:
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11/24/2010
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Publication #:
|
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Pub Dt:
|
03/24/2011
| | | | |
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Title:
|
METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR USING MULTIPLE ZONE FEED FORWARD THERMAL CONTROL
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/07/2016
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Application #:
|
13181753
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Filing Dt:
|
07/13/2011
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|
Title:
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TEMPERATURE CONTROL SYSTEM AND METHOD TDSF PLUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/21/2016
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Application #:
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13975211
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Filing Dt:
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08/23/2013
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Publication #:
|
|
Pub Dt:
|
02/12/2015
| | | | |
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Title:
|
METHOD AND APPARATUS FOR THERMAL EXCHANGE WITH TWO-PHASE MEDIA
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|
|
|
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Patent #:
|
|
Issue Dt:
|
01/01/2019
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Application #:
|
14327402
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Filing Dt:
|
07/09/2014
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|
Publication #:
|
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Pub Dt:
|
01/15/2015
| | | | |
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Title:
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TEMPERATURE CONTROL SYSTEM WITH PROGRAMMABLE ORIT VALVE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
07/09/2019
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Application #:
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15164820
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Filing Dt:
|
05/25/2016
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|
Publication #:
|
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Pub Dt:
|
09/15/2016
| | | | |
|
Title:
|
TEMPERATURE CONTROL SYSTEM AND METHOD TDSF PLUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/20/2019
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Application #:
|
15177019
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Filing Dt:
|
06/08/2016
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|
Publication #:
|
|
Pub Dt:
|
09/29/2016
| | | | |
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Title:
|
METHOD AND APPARATUS FOR THERMAL EXCHANGE WITH TWO-PHASE MEDIA
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/26/2021
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Application #:
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16423271
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Filing Dt:
|
05/28/2019
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|
Title:
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Temperature Control System and Method TDSF Plus
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