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Patent Assignment Details
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Reel/Frame:013253/0085   Pages: 2
Recorded: 09/04/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/06/2004
Application #:
10154237
Filing Dt:
05/23/2002
Publication #:
Pub Dt:
01/02/2003
Title:
METHOD OF MANUFACTURING A SEMICONDUCTOR APPARATUS WITH A TAPERED APERTURE PATTERN TO FORM A PREDETERMINED LINE WIDTH
Assignor
1
Exec Dt:
08/01/2002
Assignee
1
7-35, KITASHINAGAWA 6-CHOME
SHINAGAWA-KU, TOKYO 141, JAPAN
Correspondence name and address
SONNENSCHEIN NATH & ROSENTHAL
DAVID R. METZGER
P.O. BOX #061080 WACKER DRIVE STATION
SEARS TOWER
CHICAGO, IL 60606-1080

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