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Reel/Frame:	046070/0085			Pages:	81
		Recorded:	12/21/2017
Attorney Dkt #:	I9-04215
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 33

Patent #:	7772574	Issue Dt:	08/10/2010	Application #:	11719320	Filing Dt:	05/15/2007
Publication #:	US20090146082	Pub Dt:	06/11/2009
Title:	PATTERN LOCK SYSTEM FOR PARTICLE-BEAM EXPOSURE APPARATUS

Patent #:	8304749	Issue Dt:	11/06/2012	Application #:	11816059	Filing Dt:	05/05/2008
Publication #:	US20080230711	Pub Dt:	09/25/2008
Title:	CHARGED-PARTICLE EXPOSURE APPARATUS WITH ELECTROSTATIC ZONE PLATE

Patent #:	7737422	Issue Dt:	06/15/2010	Application #:	11816353	Filing Dt:	08/15/2007
Publication #:	US20080258084	Pub Dt:	10/23/2008
Title:	CHARGED-PARTICLE EXPOSURE APPARATUS

Patent #:	7763851	Issue Dt:	07/27/2010	Application #:	11951543	Filing Dt:	12/06/2007
Publication #:	US20080149846	Pub Dt:	06/26/2008
Title:	PARTICLE-BEAM APPARATUS WITH IMPROVED WIEN-TYPE FILTER

Patent #:	7598499	Issue Dt:	10/06/2009	Application #:	11978661	Filing Dt:	10/30/2007
Publication #:	US20080099693	Pub Dt:	05/01/2008
Title:	CHARGED-PARTICLE EXPOSURE APPARATUS

Patent #:	7687783	Issue Dt:	03/30/2010	Application #:	12038326	Filing Dt:	02/27/2008
Publication #:	US20080203317	Pub Dt:	08/28/2008
Title:	MULTI-BEAM DEFLECTOR ARRAY DEVICE FOR MASKLESS PARTICLE-BEAM PROCESSING

Patent #:	7777201	Issue Dt:	08/17/2010	Application #:	12051087	Filing Dt:	03/19/2008
Publication #:	US20080237460	Pub Dt:	10/02/2008
Title:	METHOD FOR MASKLESS PARTICLE-BEAM EXPOSURE

Patent #:	7714298	Issue Dt:	05/11/2010	Application #:	12120130	Filing Dt:	05/13/2008
Publication #:	US20080283767	Pub Dt:	11/20/2008
Title:	PATTERN DEFINITION DEVICE HAVING DISTINCT COUNTER-ELECTRODE ARRAY PLATE

Patent #:	8183543	Issue Dt:	05/22/2012	Application #:	12178153	Filing Dt:	07/23/2008
Publication #:	US20090026389	Pub Dt:	01/29/2009
Title:	MULTI-BEAM SOURCE

Patent #:	7781748	Issue Dt:	08/24/2010	Application #:	12294262	Filing Dt:	09/24/2008
Publication #:	US20090200495	Pub Dt:	08/13/2009
Title:	PARTICLE-BEAM EXPOSURE APPARATUS WITH OVERALL-MODULATION OF A PATTERNED BEAM

Patent #:	8258488	Issue Dt:	09/04/2012	Application #:	12535744	Filing Dt:	08/05/2009
Publication #:	US20100038554	Pub Dt:	02/18/2010
Title:	COMPENSATION OF DOSE INHOMOGENEITY AND IMAGE DISTORTION

Patent #:	8057972	Issue Dt:	11/15/2011	Application #:	12619071	Filing Dt:	11/16/2009
Publication #:	US20100124722	Pub Dt:	05/20/2010
Title:	CONSTANT CURRENT MULTI-BEAM PATTERNING

Patent #:	8222621	Issue Dt:	07/17/2012	Application #:	12619480	Filing Dt:	11/16/2009
Publication #:	US20100127185	Pub Dt:	05/27/2010
Title:	METHOD FOR MASKLESS PARTICLE-BEAM EXPOSURE

Patent #:	8198601	Issue Dt:	06/12/2012	Application #:	12692679	Filing Dt:	01/25/2010
Publication #:	US20100187434	Pub Dt:	07/29/2010
Title:	METHOD FOR PRODUCING A MULTI-BEAM DEFLECTOR ARRAY DEVICE HAVING ELECTRODES

Patent #:	8278635	Issue Dt:	10/02/2012	Application #:	12708737	Filing Dt:	02/19/2010
Publication #:	US20100224790	Pub Dt:	09/09/2010
Title:	GLOBAL POINT SPREADING FUNCTION IN MULTI-BEAM PATTERNING

Patent #:	8115183	Issue Dt:	02/14/2012	Application #:	12770904	Filing Dt:	04/30/2010
Publication #:	US20100252733	Pub Dt:	10/07/2010
Title:	METHOD FOR MASKLESS PARTICLE-BEAM EXPOSURE

Patent #:	8563942	Issue Dt:	10/22/2013	Application #:	12780551	Filing Dt:	05/14/2010
Publication #:	US20100288938	Pub Dt:	11/18/2010
Title:	MULTI-BEAM DEFLECTOR ARRAY MEANS WITH BONDED ELECTRODES

Patent #:	8546767	Issue Dt:	10/01/2013	Application #:	12959270	Filing Dt:	12/02/2010
Publication #:	US20110204253	Pub Dt:	08/25/2011
Title:	PATTERN DEFINITION DEVICE WITH MULTIPLE MULTIBEAM ARRAY

Patent #:	8378320	Issue Dt:	02/19/2013	Application #:	13051714	Filing Dt:	03/18/2011
Publication #:	US20110226968	Pub Dt:	09/22/2011
Title:	METHOD FOR MULTI-BEAM EXPOSURE ON A TARGET

Patent #:	9093201	Issue Dt:	07/28/2015	Application #:	14155771	Filing Dt:	01/15/2014
Publication #:	US20140197327	Pub Dt:	07/17/2014
Title:	HIGH-VOLTAGE INSULATION DEVICE FOR CHARGED-PARTICLE OPTICAL APPARATUS

Patent #:	9099277	Issue Dt:	08/04/2015	Application #:	14334274	Filing Dt:	07/17/2014
Publication #:	US20150021493	Pub Dt:	01/22/2015
Title:	Pattern Definition Device Having Multiple Blanking Arrays

Patent #:	9053906	Issue Dt:	06/09/2015	Application #:	14341381	Filing Dt:	07/25/2014
Publication #:	US20150028230	Pub Dt:	01/29/2015
Title:	METHOD FOR CHARGED-PARTICLE MULTI-BEAM EXPOSURE

Patent #:	9269543	Issue Dt:	02/23/2016	Application #:	14631690	Filing Dt:	02/25/2015
Publication #:	US20150248993	Pub Dt:	09/03/2015
Title:	COMPENSATION OF DEFECTIVE BEAMLETS IN A CHARGED-PARTICLE MULTI-BEAM EXPOSURE TOOL

Patent #:	9443699	Issue Dt:	09/13/2016	Application #:	14694959	Filing Dt:	04/23/2015
Publication #:	US20150311030	Pub Dt:	10/29/2015
Title:	MULTI-BEAM TOOL FOR CUTTING PATTERNS

Patent #:	NONE	Issue Dt:		Application #:	14694975	Filing Dt:	04/23/2015
Publication #:	US20150311031	Pub Dt:	10/29/2015
Title:	Multi-Beam Tool for Cutting Patterns

Patent #:	9495499	Issue Dt:	11/15/2016	Application #:	14726243	Filing Dt:	05/29/2015
Publication #:	US20150347660	Pub Dt:	12/03/2015
Title:	Compensation of Dose Inhomogeneity Using Overlapping Exposure Spots

Patent #:	9520268	Issue Dt:	12/13/2016	Application #:	14795535	Filing Dt:	07/09/2015
Publication #:	US20160013019	Pub Dt:	01/14/2016
Title:	Compensation of Imaging Deviations in a Particle-Beam Writer Using a Convolution Kernel

Patent #:	9373482	Issue Dt:	06/21/2016	Application #:	14795547	Filing Dt:	07/09/2015
Publication #:	US20160012170	Pub Dt:	01/14/2016
Title:	CUSTOMIZING A PARTICLE-BEAM WRITER USING A CONVOLUTION KERNEL

Patent #:	9568907	Issue Dt:	02/14/2017	Application #:	14845197	Filing Dt:	09/03/2015
Publication #:	US20160071684	Pub Dt:	03/10/2016
Title:	CORRECTION OF SHORT-RANGE DISLOCATIONS IN A MULTI-BEAM WRITER

Patent #:	9653263	Issue Dt:	05/16/2017	Application #:	15073200	Filing Dt:	03/17/2016
Publication #:	US20160276132	Pub Dt:	09/22/2016
Title:	Multi-Beam Writing of Pattern Areas of Relaxed Critical Dimension

Patent #:	9799487	Issue Dt:	10/24/2017	Application #:	15073935	Filing Dt:	03/18/2016
Publication #:	US20160276131	Pub Dt:	09/22/2016
Title:	BI-DIRECTIONAL DOUBLE-PASS MULTI-BEAM WRITING

Patent #:	10410831	Issue Dt:	09/10/2019	Application #:	15151937	Filing Dt:	05/11/2016
Publication #:	US20160336147	Pub Dt:	11/17/2016
Title:	Multi-Beam Writing Using Inclined Exposure Stripes

Patent #:	10325756	Issue Dt:	06/18/2019	Application #:	15620599	Filing Dt:	06/12/2017
Publication #:	US20170357153	Pub Dt:	12/14/2017
Title:	Method for Compensating Pattern Placement Errors Caused by Variation of Pattern Exposure Density in a Multi-Beam Writer

Assignor

IMS NANOFABRICATION AG

Exec Dt:

07/27/2017

Assignee

IMS NANOFABRICATION GMBH

SCHREYGASSE 3

VIENNA, AUSTRIA 1020

Correspondence name and address
	KPPB LLP
	2190 S. TOWNE CENTRE PLACE
	SUITE 300
	ANAHEIM, CA 92806

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