Patent Assignment Details
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| Reel/Frame: | 031195/0086 | |
| Pages: | 10 |
| | Recorded: | 09/12/2013 | | |
| Attorney Dkt #: | 4887P1026 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/29/2014
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Application #:
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13654285
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Filing Dt:
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10/17/2012
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Publication #:
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Pub Dt:
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05/02/2013
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Title:
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PULSED PLASMA WITH LOW WAFER TEMPERATURE FOR ULTRA THIN LAYER ETCHES
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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JUSTIN K. BRASK
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1279 OAKMEAD PARKWAY
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SUNNYVALE, CA 94085-4040
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