Patent Assignment Details
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| Reel/Frame: | 009527/0087 | |
| Pages: | 3 |
| | Recorded: | 10/19/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/30/2001
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Application #:
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09174541
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Filing Dt:
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10/19/1998
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Title:
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SUBSTRATE PROCESSING APPARATUS WITH POWER DISTRIBUTION CONTROL FOR REDUCED POWER CONSUMPTION DURING APPARATUS START UP
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Assignee
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| MINATO-KU |
| 3-6 AKASAKA 5-CHOME |
| TOKYO, JAPAN 107-8 |
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Correspondence name and address
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FOLEY & LARDNER
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RICHARD LINN
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3000 K STREET, N.W.SUITE 500
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WASHINGTON, D.C. 20007-5109
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