Total properties:
44
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Patent #:
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Issue Dt:
|
06/14/2011
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Application #:
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11789578
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Filing Dt:
|
04/24/2007
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Publication #:
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Pub Dt:
|
10/30/2008
| | | | |
Title:
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ORIENTATION-DEPENDENT ETCHING OF DEPOSITED ALUMINUM NITRIDE FOR STRUCTURAL USE AND SACRIFICIAL LAYERS IN MEMS
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Patent #:
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Issue Dt:
|
01/15/2013
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Application #:
|
12671483
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Filing Dt:
|
01/29/2010
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Publication #:
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Pub Dt:
|
08/12/2010
| | | | |
Title:
|
MICROMECHANICAL RATE-OF-ROTATION SENSOR
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Patent #:
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|
Issue Dt:
|
05/29/2012
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Application #:
|
12685992
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Filing Dt:
|
01/12/2010
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Publication #:
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Pub Dt:
|
07/14/2011
| | | | |
Title:
|
ELECTROSTATIC MEMS DRIVER WITH ON-CHIP CAPACITANCE MEASUREMENT FOR AUTOFOCUS APPLICATIONS
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Patent #:
|
|
Issue Dt:
|
05/27/2014
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Application #:
|
12739495
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Filing Dt:
|
11/01/2010
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Publication #:
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|
Pub Dt:
|
02/24/2011
| | | | |
Title:
|
Method and Device for Contactless Sensing Rotation and Angular Position Using Orientation Tracking
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|
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Patent #:
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|
Issue Dt:
|
12/04/2012
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Application #:
|
12793129
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Filing Dt:
|
06/03/2010
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Publication #:
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Pub Dt:
|
12/09/2010
| | | | |
Title:
|
A MEMS ROTATIONAL SENSOR WITH IMPROVED ANCHORING
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|
|
Patent #:
|
|
Issue Dt:
|
04/30/2013
|
Application #:
|
13001126
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Filing Dt:
|
12/23/2010
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Publication #:
|
|
Pub Dt:
|
04/28/2011
| | | | |
Title:
|
MICROGYROSCOPE
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|
|
Patent #:
|
|
Issue Dt:
|
07/29/2014
|
Application #:
|
13203545
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Filing Dt:
|
08/26/2011
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Publication #:
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|
Pub Dt:
|
12/15/2011
| | | | |
Title:
|
MEMS GYROSCOPE FOR DETECTING ROTATIONAL MOTIONS ABOUT AN X-, Y-, AND/OR Z-AXIS
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|
|
Patent #:
|
|
Issue Dt:
|
10/07/2014
|
Application #:
|
13203550
|
Filing Dt:
|
08/26/2011
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Publication #:
|
|
Pub Dt:
|
12/22/2011
| | | | |
Title:
|
ELECTROMECHANIC MICROSENSOR
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|
|
Patent #:
|
|
Issue Dt:
|
07/09/2013
|
Application #:
|
13203554
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Filing Dt:
|
08/26/2011
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Publication #:
|
|
Pub Dt:
|
03/01/2012
| | | | |
Title:
|
MICROGYROSCOPE FOR DETERMINING ROTATIONAL MOVEMENTS ABOUT AN X AND/OR Y AND Z AXIS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/15/2015
|
Application #:
|
13258153
|
Filing Dt:
|
09/21/2011
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Publication #:
|
|
Pub Dt:
|
01/26/2012
| | | | |
Title:
|
METHOD FOR DETECTING ACCELERATIONS AND ROTATION RATES, AND MEMS SENSOR
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|
|
Patent #:
|
|
Issue Dt:
|
07/15/2014
|
Application #:
|
13258177
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Filing Dt:
|
09/21/2011
|
Publication #:
|
|
Pub Dt:
|
02/02/2012
| | | | |
Title:
|
MICRO GYROSCOPE FOR DETERMINING ROTATIONAL MOVEMENTS ABOUT THREE SPATIAL AXES WHICH ARE PERPENDICULAR TO ONE ANOTHER
|
|
|
Patent #:
|
|
Issue Dt:
|
08/11/2015
|
Application #:
|
13266985
|
Filing Dt:
|
10/28/2011
|
Publication #:
|
|
Pub Dt:
|
02/23/2012
| | | | |
Title:
|
Micromechanical Sensor WITH MULTIPLE SPRING BARS
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|
|
Patent #:
|
|
Issue Dt:
|
09/09/2014
|
Application #:
|
13318002
|
Filing Dt:
|
10/28/2011
|
Publication #:
|
|
Pub Dt:
|
03/01/2012
| | | | |
Title:
|
MICROMECHANICAL SENSOR
|
|
|
Patent #:
|
|
Issue Dt:
|
12/09/2014
|
Application #:
|
13319234
|
Filing Dt:
|
11/07/2011
|
Publication #:
|
|
Pub Dt:
|
03/08/2012
| | | | |
Title:
|
MICROGYROSCOPE FOR DETERMINING ROTATIONAL MOTIONS ABOUT AT LEAST ONE OF THREE PERPENDICULAR SPATIAL AXES
|
|
|
Patent #:
|
|
Issue Dt:
|
10/13/2015
|
Application #:
|
13641663
|
Filing Dt:
|
10/16/2012
|
Publication #:
|
|
Pub Dt:
|
02/07/2013
| | | | |
Title:
|
MICRO-GYROSCOPE FOR DETECTING MOTIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2016
|
Application #:
|
13657067
|
Filing Dt:
|
10/22/2012
|
Publication #:
|
|
Pub Dt:
|
07/23/2015
| | | | |
Title:
|
System and Method to Reduce Power Consumption in a Multi-Sensor Environment
|
|
|
Patent #:
|
|
Issue Dt:
|
11/03/2015
|
Application #:
|
13705680
|
Filing Dt:
|
12/05/2012
|
Publication #:
|
|
Pub Dt:
|
10/09/2014
| | | | |
Title:
|
Micro-Electromechanical Structure with Low Sensitivity to Thermo-Mechanical Stress
|
|
|
Patent #:
|
|
Issue Dt:
|
09/15/2015
|
Application #:
|
13716950
|
Filing Dt:
|
12/17/2012
|
Publication #:
|
|
Pub Dt:
|
10/09/2014
| | | | |
Title:
|
MICROELECTROMECHANICAL Z-AXIS OUT-OF-PLANE STOPPER
|
|
|
Patent #:
|
|
Issue Dt:
|
03/08/2016
|
Application #:
|
13720217
|
Filing Dt:
|
12/19/2012
|
Publication #:
|
|
Pub Dt:
|
10/17/2013
| | | | |
Title:
|
MICROMECHANICAL CORIOLIS RATE OF ROTATION SENSOR
|
|
|
Patent #:
|
|
Issue Dt:
|
08/18/2015
|
Application #:
|
13720262
|
Filing Dt:
|
12/19/2012
|
Publication #:
|
|
Pub Dt:
|
06/27/2013
| | | | |
Title:
|
MICRO-GYROSCOPE AND METHOD FOR OPERATING A MICRO-GYROSCOPE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/06/2015
|
Application #:
|
13720426
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Filing Dt:
|
12/19/2012
|
Publication #:
|
|
Pub Dt:
|
07/04/2013
| | | | |
Title:
|
MICRO RATE OF ROTATION SENSOR AND METHOD FOR OPERATING A MICRO RATE OF ROTATION SENSOR
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13720447
|
Filing Dt:
|
12/19/2012
|
Publication #:
|
|
Pub Dt:
|
07/04/2013
| | | | |
Title:
|
MEMS ACCELERATION SENSOR
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13720478
|
Filing Dt:
|
12/19/2012
|
Publication #:
|
|
Pub Dt:
|
07/04/2013
| | | | |
Title:
|
MICROELECTROMECHANICAL SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/09/2018
|
Application #:
|
13724840
|
Filing Dt:
|
12/21/2012
|
Title:
|
Comprehensive Sensor Fusion Algorithm
|
|
|
Patent #:
|
|
Issue Dt:
|
12/16/2014
|
Application #:
|
13736591
|
Filing Dt:
|
01/08/2013
|
Publication #:
|
|
Pub Dt:
|
10/09/2014
| | | | |
Title:
|
ELECTRO-MECHANICAL RESONANCE LOOP
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2016
|
Application #:
|
13757307
|
Filing Dt:
|
02/01/2013
|
Title:
|
Method and Apparatus for an Isolating Structure
|
|
|
Patent #:
|
|
Issue Dt:
|
05/03/2016
|
Application #:
|
13952877
|
Filing Dt:
|
07/29/2013
|
Title:
|
Innovative angular sensor read-out multi-axes digital front-end chain
|
|
|
Patent #:
|
|
Issue Dt:
|
12/13/2016
|
Application #:
|
14047944
|
Filing Dt:
|
01/29/2014
|
Publication #:
|
|
Pub Dt:
|
01/01/2015
| | | | |
Title:
|
Recovery system and methods for MEMS devices
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/2017
|
Application #:
|
14067105
|
Filing Dt:
|
10/30/2013
|
Title:
|
Systems and methods to stabilize high-Q MEMS sensors
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/2017
|
Application #:
|
14067727
|
Filing Dt:
|
10/30/2013
|
Title:
|
WAFER LEVEL MICRO-ELECTRO-MECHANICAL SYSTEMS PACKAGE WITH ACCELEROMETER AND GYROSCOPE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2017
|
Application #:
|
14093909
|
Filing Dt:
|
12/02/2013
|
Title:
|
Systems and methods to reduce sensor bias
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2017
|
Application #:
|
14185672
|
Filing Dt:
|
02/20/2014
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Publication #:
|
|
Pub Dt:
|
04/09/2015
| | | | |
Title:
|
Systems and methods to determine stiction failures in MEMS devices
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|
|
Patent #:
|
|
Issue Dt:
|
07/05/2016
|
Application #:
|
14288272
|
Filing Dt:
|
05/27/2014
|
Publication #:
|
|
Pub Dt:
|
09/18/2014
| | | | |
Title:
|
Method and device for contactless sensing rotation and angular position using orientation tracking
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14331124
|
Filing Dt:
|
07/14/2014
|
Publication #:
|
|
Pub Dt:
|
11/27/2014
| | | | |
Title:
|
Microgyroscope for Determining Rotational Movements About Three Spatial Axes which are Perpendicular to One Another
|
|
|
Patent #:
|
|
Issue Dt:
|
03/06/2018
|
Application #:
|
14444800
|
Filing Dt:
|
07/28/2014
|
Publication #:
|
|
Pub Dt:
|
01/28/2016
| | | | |
Title:
|
MEMS GYROSCOPE FOR DETERMINING ROTATIONAL MOVEMENTS ABOUT AN X, Y, AND/OR Z AXIS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2017
|
Application #:
|
14464307
|
Filing Dt:
|
08/20/2014
|
Publication #:
|
|
Pub Dt:
|
12/04/2014
| | | | |
Title:
|
Micromechanical sensor
|
|
|
Patent #:
|
|
Issue Dt:
|
06/12/2018
|
Application #:
|
14477017
|
Filing Dt:
|
09/04/2014
|
Publication #:
|
|
Pub Dt:
|
11/19/2015
| | | | |
Title:
|
SYSTEMS AND METHODS FOR MEMS GYROSCOPE SHOCK ROBUSTNESS
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|
|
Patent #:
|
|
Issue Dt:
|
08/08/2017
|
Application #:
|
14477051
|
Filing Dt:
|
09/04/2014
|
Publication #:
|
|
Pub Dt:
|
11/19/2015
| | | | |
Title:
|
SHOCK-ROBUST INTEGRATED MULTI-AXIS MEMS GYROSCOPE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/31/2016
|
Application #:
|
14537898
|
Filing Dt:
|
11/10/2014
|
Publication #:
|
|
Pub Dt:
|
10/01/2015
| | | | |
Title:
|
MEMS PRESSURE SENSOR WITH IMPROVED INSENSITIVITY TO THERMO-MECHANICAL STRESS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/01/2017
|
Application #:
|
14828306
|
Filing Dt:
|
08/17/2015
|
Publication #:
|
|
Pub Dt:
|
02/11/2016
| | | | |
Title:
|
Micro-Gyroscope and Method for Operating a Micro-Gyroscope
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2017
|
Application #:
|
14853592
|
Filing Dt:
|
09/14/2015
|
Publication #:
|
|
Pub Dt:
|
01/07/2016
| | | | |
Title:
|
MEMS SENSORS AND METHODS FOR DETECTING ROTATION RATES
|
|
|
Patent #:
|
|
Issue Dt:
|
10/10/2017
|
Application #:
|
14875379
|
Filing Dt:
|
10/05/2015
|
Publication #:
|
|
Pub Dt:
|
02/04/2016
| | | | |
Title:
|
MICRO RATE OF ROTATION SENSOR AND METHOD FOR OPERATING A MICRO RATE OF ROTATION SENSOR
|
|
|
Patent #:
|
|
Issue Dt:
|
01/02/2018
|
Application #:
|
14882115
|
Filing Dt:
|
10/13/2015
|
Publication #:
|
|
Pub Dt:
|
06/23/2016
| | | | |
Title:
|
MICRO-GYROSCOPE FOR DETECTING MOTIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/17/2018
|
Application #:
|
15048020
|
Filing Dt:
|
02/19/2016
|
Publication #:
|
|
Pub Dt:
|
06/16/2016
| | | | |
Title:
|
MICROMECHANICAL CORIOLIS RATE OF ROTATION SENSOR
|
|