Patent Assignment Details
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Reel/Frame: | 009165/0092 | |
| Pages: | 3 |
| | Recorded: | 05/11/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09013705
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Filing Dt:
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01/26/1998
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Title:
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PLASMA ETCHING METHOD AND PLASMA ETCHING SYSTEM FOR CARRYING OUT THE SAME
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Assignee
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30-3, NISHIROKUGOU 4-CHOME |
OHTA-KU, TOKYO, JAPAN |
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Correspondence name and address
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SNELL & WILMER LLP
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MICHAEL K. KELLY
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ONE ARIZONA CENTER
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400 EAST VAN BUREN
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PHOENIX, AZ 85004-0001
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