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Reel/Frame:024055/0092   Pages: 9
Recorded: 03/10/2010
Attorney Dkt #:AMK-5452-5
Conveyance: LICENSE (SEE DOCUMENT FOR DETAILS).
Total properties: 23
1
Patent #:
5742062
Issue Dt:
04/21/1998
Application #:
08598081
Filing Dt:
02/08/1996
Title:
ARRANGEMENT FOR MASKED BEAM LITHOGRAPHY BY MEANS OF ELECTRICALLY CHARGED PARTICLES
2
Patent #:
5801388
Issue Dt:
09/01/1998
Application #:
08669481
Filing Dt:
09/17/1996
Title:
PARTICLE BEAM, IN PARTICULAR IONIC OPTIC IMAGING SYSTEM
3
Patent #:
5874739
Issue Dt:
02/23/1999
Application #:
08914070
Filing Dt:
08/18/1997
Title:
ARRANGEMENT FOR SHADOW-CASTING LITHOGRAPHY
4
Patent #:
6326632
Issue Dt:
12/04/2001
Application #:
09417633
Filing Dt:
10/13/1999
Title:
PARTICLE-OPTICAL IMAGING SYSTEM FOR LITHOGRAPHY PURPOSES
5
Patent #:
6661015
Issue Dt:
12/09/2003
Application #:
09950140
Filing Dt:
09/10/2001
Publication #:
US20020033457
Pub Dt:
03/21/2002
Title:
PATTERN LOCK SYSTEM
6
Patent #:
6768125
Issue Dt:
07/27/2004
Application #:
10337903
Filing Dt:
01/08/2003
Publication #:
US20030155534
Pub Dt:
08/21/2003
Title:
MASKLESS PARTICLE-BEAM SYSTEM FOR EXPOSING A PATTERN ON A SUBSTRATE
7
Patent #:
6858118
Issue Dt:
02/22/2005
Application #:
10395572
Filing Dt:
03/24/2003
Publication #:
US20040188243
Pub Dt:
09/30/2004
Title:
APPARATUS FOR ENHANCING THE LIFETIME OF STENCIL MASKS
8
Patent #:
6909103
Issue Dt:
06/21/2005
Application #:
10886463
Filing Dt:
07/07/2004
Publication #:
US20050012052
Pub Dt:
01/20/2005
Title:
ION IRRADIATION OF A TARGET AT VERY HIGH AND VERY LOW KINETIC ION ENERGIES
9
Patent #:
7199373
Issue Dt:
04/03/2007
Application #:
10951087
Filing Dt:
09/27/2004
Publication #:
US20050072933
Pub Dt:
04/07/2005
Title:
PARTICLE-OPTIC ELECTROSTATIC LENS
10
Patent #:
7214951
Issue Dt:
05/08/2007
Application #:
10969493
Filing Dt:
10/20/2004
Publication #:
US20050104013
Pub Dt:
05/19/2005
Title:
CHARGED-PARTICLE MULTI-BEAM EXPOSURE APPARATUS
11
Patent #:
7084411
Issue Dt:
08/01/2006
Application #:
10974276
Filing Dt:
10/27/2004
Publication #:
US20050087701
Pub Dt:
04/28/2005
Title:
PATTERN-DEFINITION DEVICE FOR MASKLESS PARTICLE-BEAM EXPOSURE APPARATUS
12
Patent #:
7436120
Issue Dt:
10/14/2008
Application #:
11070439
Filing Dt:
03/02/2005
Publication #:
US20050195551
Pub Dt:
09/08/2005
Title:
COMPENSATION OF MAGNETIC FIELDS
13
Patent #:
7276714
Issue Dt:
10/02/2007
Application #:
11119025
Filing Dt:
04/29/2005
Publication #:
US20050242302
Pub Dt:
11/03/2005
Title:
ADVANCED PATTERN DEFINITION FOR PARTICLE-BEAM PROCESSING
14
Patent #:
7388217
Issue Dt:
06/17/2008
Application #:
11700468
Filing Dt:
01/31/2007
Publication #:
US20070125956
Pub Dt:
06/07/2007
Title:
PARTICLE-OPTICAL PROJECTION SYSTEM
15
Patent #:
7772574
Issue Dt:
08/10/2010
Application #:
11719320
Filing Dt:
05/15/2007
Publication #:
US20090146082
Pub Dt:
06/11/2009
Title:
PATTERN LOCK SYSTEM FOR PARTICLE-BEAM EXPOSURE APPARATUS
16
Patent #:
8304749
Issue Dt:
11/06/2012
Application #:
11816059
Filing Dt:
05/05/2008
Publication #:
US20080230711
Pub Dt:
09/25/2008
Title:
CHARGED-PARTICLE EXPOSURE APPARATUS WITH ELECTROSTATIC ZONE PLATE
17
Patent #:
7737422
Issue Dt:
06/15/2010
Application #:
11816353
Filing Dt:
08/15/2007
Publication #:
US20080258084
Pub Dt:
10/23/2008
Title:
CHARGED-PARTICLE EXPOSURE APPARATUS
18
Patent #:
7763851
Issue Dt:
07/27/2010
Application #:
11951543
Filing Dt:
12/06/2007
Publication #:
US20080149846
Pub Dt:
06/26/2008
Title:
PARTICLE-BEAM APPARATUS WITH IMPROVED WIEN-TYPE FILTER
19
Patent #:
7598499
Issue Dt:
10/06/2009
Application #:
11978661
Filing Dt:
10/30/2007
Publication #:
US20080099693
Pub Dt:
05/01/2008
Title:
CHARGED-PARTICLE EXPOSURE APPARATUS
20
Patent #:
7777201
Issue Dt:
08/17/2010
Application #:
12051087
Filing Dt:
03/19/2008
Publication #:
US20080237460
Pub Dt:
10/02/2008
Title:
METHOD FOR MASKLESS PARTICLE-BEAM EXPOSURE
21
Patent #:
7714298
Issue Dt:
05/11/2010
Application #:
12120130
Filing Dt:
05/13/2008
Publication #:
US20080283767
Pub Dt:
11/20/2008
Title:
PATTERN DEFINITION DEVICE HAVING DISTINCT COUNTER-ELECTRODE ARRAY PLATE
22
Patent #:
8183543
Issue Dt:
05/22/2012
Application #:
12178153
Filing Dt:
07/23/2008
Publication #:
US20090026389
Pub Dt:
01/29/2009
Title:
MULTI-BEAM SOURCE
23
Patent #:
7781748
Issue Dt:
08/24/2010
Application #:
12294262
Filing Dt:
09/24/2008
Publication #:
US20090200495
Pub Dt:
08/13/2009
Title:
PARTICLE-BEAM EXPOSURE APPARATUS WITH OVERALL-MODULATION OF A PATTERNED BEAM
Assignor
1
IMS NANOFABRICATION AG
Exec Dt:
03/03/2010
Assignee
1
INTEL CORPORATION
2200 MISSION COLLEGE BLVD.
SANTA CLARA, CALIFORNIA 95052
Correspondence name and address
ALAN M. KAGEN/NIXON & VANDERHYE P.C.
901 N. GLEBE ROAD, 11TH FLOOR
ARLINGTON, VA 22203-1808

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