Patent Assignment Details
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Reel/Frame: | 037765/0093 | |
| Pages: | 4 |
| | Recorded: | 02/18/2016 | | |
Attorney Dkt #: | 467420US20 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/28/2019
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Application #:
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15046781
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Filing Dt:
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02/18/2016
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Publication #:
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Pub Dt:
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03/02/2017
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Assignee
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1-1, SHIBAURA 1-CHOME, MINATO-KU |
TOKYO, JAPAN |
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Correspondence name and address
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OBLON, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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