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Patent Assignment Details
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Reel/Frame:018070/0096   Pages: 3
Recorded: 06/30/2006
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10565612
Filing Dt:
07/06/2006
Publication #:
Pub Dt:
06/14/2007
Title:
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD FOR INTRODUCING AN IMMERSION LIQUID INTO AN IMMERSION SPACE
Assignors
1
Exec Dt:
03/22/2006
2
Exec Dt:
03/02/2006
3
Exec Dt:
02/17/2006
4
Exec Dt:
02/20/2006
Assignee
1
CARL-ZEISS-STR. 22
OBERKOCHEN, GERMANY D-73447
Correspondence name and address
MICHEAL D. LAKE
FACTOR & LAKE, LTD.
1427 W. WASHINGTON BLVD., SUITE 5G/H
CHICAGO, IL 60607

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