Patent Assignment Details
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| Reel/Frame: | 009196/0097 | |
| Pages: | 5 |
| | Recorded: | 05/04/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/07/2000
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Application #:
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08984225
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Filing Dt:
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12/03/1997
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Title:
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METHOD AND APPARATUS FOR LOW ENERGY ELECTRON ENHANCED ETCHING AND CLEANING OF SUBSTRATES IN THE POSITIVE COLUMN OF A PLASMA
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Assignee
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| CENTENNIAL RESEARCH BUILDING |
| 400 TENTH STREET |
| ATLANTA, GEORGIA 30332 |
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Correspondence name and address
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THOMAS, KAYDEN, HORSTEMEYER ET AL.
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SCOTT A. HORSTMEYER
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100 GALLERIA PARKWAY, STE. 1500
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ATLANTA, GA 30339
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