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Reel/Frame:027177/0100   Pages: 4
Recorded: 11/04/2011
Attorney Dkt #:2857.1780001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/02/2015
Application #:
13206592
Filing Dt:
08/10/2011
Publication #:
Pub Dt:
03/15/2012
Title:
ALIGNMENT MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS, AND A METHOD TO DETERMINE ALIGNMENT IN A LITHOGRAPHIC APPARATUS
Assignors
1
Exec Dt:
09/29/2011
2
Exec Dt:
10/10/2011
3
Exec Dt:
09/29/2011
Assignee
1
DE RUN 6501
VELDHOVEN, NETHERLANDS NL - 5504 DR
Correspondence name and address
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005

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