Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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Reel/Frame: | 004821/0101 | |
| Pages: | 1 |
| | Recorded: | 01/25/1988 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/27/1988
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Application #:
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07147422
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Filing Dt:
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01/25/1988
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Title:
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IN SITU CONDUCTIVITY MONITORING TECHNIQUE FOR CHEMICAL/MECHANICAL PLANARIZATION ENDPOINT DETECTION
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Correspondence name and address
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SUGHRUE, MION, ZINN, MAC PEAK & SEAS
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1776 K STREET, N. W.
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WASHINGTON, DC 20006
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