Patent Assignment Details
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| Reel/Frame: | 020418/0101 | |
| Pages: | 2 |
| | Recorded: | 01/25/2008 | | |
| Attorney Dkt #: | 8017-1250 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12019728
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Filing Dt:
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01/25/2008
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Publication #:
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Pub Dt:
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07/31/2008
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Title:
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SEMICONDUCTOR DEVICE HAVING A FOCUS MONITOR MARK, FOCUS MONITORING METHOD, AND DEVICE PRODUCTION METHOD WITH DOT PATTERN MARK AND HOLE PATTERN MARK TO OPTIMIZE FOCUS POSITION AND EXPOSURE DOSE
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Assignee
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| 2-1, YAESU 2-CHOME, CHUO-KU |
| TOKYO, JAPAN 104-0028 |
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Correspondence name and address
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YOUNG & THOMPSON
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745 SOUTH 23RD STREET
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2ND FLOOR
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ARLINGTON, VA 22202
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