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Reel/Frame:026754/0101   Pages: 3
Recorded: 08/16/2011
Attorney Dkt #:30062-0058001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
08/01/2017
Application #:
13103281
Filing Dt:
05/09/2011
Publication #:
Pub Dt:
11/01/2012
Title:
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FOCUSED PARTICLE BEAM
Assignors
1
Exec Dt:
08/01/2011
2
Exec Dt:
07/26/2011
3
Exec Dt:
07/26/2011
Assignee
1
CARL-ZEISS-PROMENADE 10
07745 JENA, GERMANY
Correspondence name and address
MARC M. WEFERS
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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