Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 018609/0102 | |
| Pages: | 4 |
| | Recorded: | 12/11/2006 | | |
| Attorney Dkt #: | 100338 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11591730
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Filing Dt:
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11/02/2006
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Publication #:
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Pub Dt:
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05/08/2008
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Title:
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CMP of copper/ruthenium/tantalum substrates
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Assignee
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| 870 NORTH COMMONS DRIVE |
| AURORA, ILLINOIS 60504 |
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Correspondence name and address
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STEVEN WESEMAN
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CABOT MICROELECTRONICS CORPORATION
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870 NORTH COMMONS DRIVE
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AURORA, IL 60504
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