Patent Assignment Details
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Reel/Frame: | 006351/0116 | |
| Pages: | 3 |
| | Recorded: | 01/04/1993 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/06/1994
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Application #:
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08000157
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Filing Dt:
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01/04/1993
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Title:
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REFRACTIVE/DIFFRACTIVE OPTICAL SYSTEM FOR BROAD-BAND THROUGH-THE-LENS IMAGING OF ALIGNMENT MARKS ON SUBSTRATES IN STEPPER MACHINES
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Assignee
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ROCHESTER, NEW YORK 14627 |
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Correspondence name and address
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MARTIN LUKACHER
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SUITE 900
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CLINTON SQUARE
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ROCHESTER, NY 14604-1792
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