Patent Assignment Details
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Reel/Frame: | 014891/0118 | |
| Pages: | 3 |
| | Recorded: | 01/20/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/27/2008
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Application #:
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10667006
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Filing Dt:
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09/19/2003
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Publication #:
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Pub Dt:
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06/17/2004
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Title:
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SYSTEM FOR AND METHOD OF GAS CLUSTER ION BEAM PROCESSING
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Assignee
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37 MANNING ROAD |
BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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PERKINS, SMITH & COHEN
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JERRY COHEN
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ONE BEACON STREET
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BOSTON, MA 02108
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