Patent Assignment Details
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Reel/Frame: | 022250/0120 | |
| Pages: | 3 |
| | Recorded: | 02/12/2009 | | |
Attorney Dkt #: | 338367US2X |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/21/2012
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Application #:
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12369252
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Filing Dt:
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02/11/2009
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Publication #:
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Pub Dt:
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08/13/2009
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Title:
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CHARGED PARTICLE BEAM WRITING APPARATUS, AND APPARATUS AND METHOD FOR CORRECTING DIMENSION ERROR OF PATTERN
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Assignee
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2068-3, OOKA |
NUMAZU-SHI, SHIZUOKA, JAPAN 410-8510 |
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Correspondence name and address
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OBLON, SPIVAK ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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