Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 060855/0120 | |
| Pages: | 4 |
| | Recorded: | 08/22/2022 | | |
| Attorney Dkt #: | 095714-1661 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/02/2024
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Application #:
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17751545
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Filing Dt:
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05/23/2022
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Publication #:
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Pub Dt:
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09/08/2022
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Title:
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TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABERRATION OF REFLECTION IMAGE
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Assignee
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| NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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Correspondence name and address
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MCDERMOTT WILL & EMERY LLP
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THE MCDERMOTT BUILDING
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500 NORTH CAPITOL STREET NW
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WASHINGTON, DC 20001
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05/29/2024 08:17 PM
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