Patent Assignment Details
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Reel/Frame: | 015355/0122 | |
| Pages: | 4 |
| | Recorded: | 05/24/2004 | | |
Conveyance: | MERGER (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/07/2000
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Application #:
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09493492
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Filing Dt:
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01/28/2000
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Title:
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Wafer processing reactor having a gas flow control system and method
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Assignee
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440 KINGS VILLAGE ROAD |
SCOTTS VALLEY, CALIFORNIA 95066 |
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Correspondence name and address
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DORSEY & WHITNEY LLP
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MARIA S. SWIATEK
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850 HANSEN WAY, SUITE 200
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PALO ALTO, CA 94304-1017
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