Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 026560/0123 | |
| Pages: | 12 |
| | Recorded: | 07/08/2011 | | |
| Attorney Dkt #: | APPM/4227 C5 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11981930
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Filing Dt:
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10/31/2007
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Publication #:
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Pub Dt:
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08/21/2008
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Title:
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Etch pattern definition using a CVD organic layer as an anti-reflection coating and hardmask
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PATTERSON & SHERIDAN, LLP
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595 SHREWSBURY AVENUE
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SUITE 100
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SHREWSBURY, NJ 07702
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