Patent Assignment Details
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Reel/Frame: | 018615/0124 | |
| Pages: | 2 |
| | Recorded: | 12/08/2006 | | |
Attorney Dkt #: | 129545 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/19/2010
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Application #:
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11547137
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Filing Dt:
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12/08/2006
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Title:
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SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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14-1, SOTO-KANDA 4-CHOME |
CHIYODA-KU, TOKYO 101-8980, JAPAN |
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Correspondence name and address
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JAMES A. OLIFF
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OLIFF & BERRIDGE, PLC
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P.O. BOX 19928
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ALEXANDRIA, VA 22320
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