Patent Assignment Details
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| Reel/Frame: | 047138/0126 | |
| Pages: | 5 |
| | Recorded: | 10/11/2018 | | |
| Attorney Dkt #: | 4030-0672US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/29/2020
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Application #:
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15779894
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Filing Dt:
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05/30/2018
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Publication #:
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Pub Dt:
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12/27/2018
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Title:
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METHOD FOR CLEANING CHAMBER OF SUBSTRATE PROCESSING APPARATUS
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Assignee
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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ROTHWELL, FIGG, ERNST & MANBECK, P.C.
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607 14TH STREET, N.W.
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SUITE 800
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WASHINGTON, DC 20005
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