Patent Assignment Details
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Reel/Frame: | 031324/0128 | |
| Pages: | 7 |
| | Recorded: | 10/01/2013 | | |
Attorney Dkt #: | 21070-0042002 |
Conveyance: | MODIFYING CONVERSION |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/06/2015
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Application #:
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14036563
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Filing Dt:
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09/25/2013
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Publication #:
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Pub Dt:
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02/06/2014
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Title:
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IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY
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Assignee
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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SEAN P. DALEY
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FISH & RICHARDSON P.C.
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P.O.BOX 1022
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MINNEAPOLIS, MN 55440-1022
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