Patent Assignment Details
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Reel/Frame: | 011664/0130 | |
| Pages: | 2 |
| | Recorded: | 04/09/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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09734232
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Filing Dt:
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12/11/2000
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Publication #:
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Pub Dt:
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07/18/2002
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Title:
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LOW TEMPERATURE, HIGH QUALITY SILICON DIOXIDE THIN FILMS DEPOSITED USING TETRAMETHYLSILANE (TMS) FOR STRESS CONTROL AND COVERAGE APPLICATIONS
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Assignee
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200 INNOVATION BOULEVARD |
113 TECHNOLOGY CENTER |
UNIVERSITY PARK, PENNSYLVANIA 16802 |
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Correspondence name and address
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OHLANDT, GREELEY, RUGGIERO & ET AL
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PAUL D. GREELEY, ESQ.
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ONE LANDMARK SQUARE, 10TH FLOOR
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STAMFORD, CONNECTICUT 06901-2682
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