Patent Assignment Details
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| Reel/Frame: | 032691/0131 | |
| Pages: | 10 |
| | Recorded: | 04/16/2014 | | |
| Attorney Dkt #: | 017173USAETCHDRIEMDD |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14179749
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Filing Dt:
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02/13/2014
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Publication #:
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Pub Dt:
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08/14/2014
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Title:
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AUTOMATED ALGORITHM FOR TUNING OF FEEDFORWARD CONTROL PARAMETERS IN PLASMA PROCESSING SYSTEM
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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VANESSA L. YAZICIGIL
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1279 OAKMEAD PARKWAY
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SUNNYVALE, CA 94085-4040
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