Patent Assignment Details
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Reel/Frame: | 017723/0133 | |
| Pages: | 7 |
| | Recorded: | 03/22/2006 | | |
Attorney Dkt #: | 05-CCS-003 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/03/2008
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Application #:
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11386327
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Filing Dt:
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03/22/2006
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Publication #:
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Pub Dt:
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09/27/2007
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Title:
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PROCESSES FOR MONITORING THE LEVELS OF OXYGEN AND/OR NITROGEN SPECIES IN A SUBSTANTIALLY OXYGEN AND NITROGEN-FREE PLASMA ASHING PROCESS
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Assignee
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108 CHERRY HILL DRIVE |
BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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CANTOR COLBURN LLP
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55 GRIFIN ROAD SOUTH
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BLOOMFIELD, CT 06002
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