Patent Assignment Details
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Reel/Frame: | 037533/0134 | |
| Pages: | 10 |
| | Recorded: | 01/20/2016 | | |
Attorney Dkt #: | 023566 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/23/2017
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Application #:
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14978938
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Filing Dt:
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12/22/2015
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Title:
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ION-ASSISTED DEPOSITION AND IMPLANTATION OF PHOTORESIST TO IMPROVE LINE EDGE ROUGHNESS
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Assignee
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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KACVINSKY DAISAK BLUNI PLLC
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3120 PRINCETON PIKE
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SUITE 303
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LAWRENCEVILLE, NJ 08648
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